Temperature Dependence of the Infrared Absorption Cross-Sections of Neutral Species Commonly Found in Fluorocarbon Plasmas

dc.contributor.ISNI0000 0000 5396 3610 (Goeckner, MJ)
dc.contributor.ISNI0000 0003 5379 4329 (Overzet, LJ)
dc.contributor.LCNA2008008261‏ (Goeckner, MJ)
dc.contributor.authorNelson, Caleb T.en_US
dc.contributor.authorOverzet, Lawrence J.en_US
dc.contributor.authorGoeckner, Matthew J.en_US
dc.date.accessioned2014-02-13T19:39:58Z
dc.date.available2014-02-13T19:39:58Z
dc.date.created2012-2-1en_US
dc.description.abstractThis article serves as a reference for the analysis of Fourier transform infrared spectroscopy data from processing plasmas. Until now, there has been a lack of accurate reference data for addressing the problems of species identification and density measurements in cases of increasing gas temperatures. Our results show that, while the integrated absorption cross-sections do not change significantly as temperature increases, the temperature of the absorbing species can be estimated from the rotational band maximum in most cases. Integrated absorption cross-sections for c-C3F6, C4F8, C3F8, C2F6, C2F4, and CF4 are presented for all fundamental bands in the 650 cm(-1) to 2000 cm(-1) region. In addition, the binary combination bands up to 4000 cm(-1) are presented for all species. The temperature of each species has been varied to correspond to neutral temperatures commonly found in processing plasmas.en_US
dc.identifier.citationNelson, Caleb T., Lawrence J. Overzet, and Matthew J. Goeckner. 2012. "Temperature dependence of the infrared absorption cross-sections of neutral species commonly found in fluorocarbon plasmas." Journal of Vacuum Science & Technology A 30(2): 021305-021305.en_US
dc.identifier.issn0734-2101en_US
dc.identifier.issue2en_US
dc.identifier.startpage21305en_US
dc.identifier.urihttp://hdl.handle.net/10735.1/3052
dc.identifier.volume30en_US
dc.relation.urihttp://dx.doi.org/10.1116/1.3679408en_US
dc.rights© 2012 American Vacuum Societyen_US
dc.source.journalJournal of Vacuum Science & Technology Aen_US
dc.subjectFourier transform infrared spectroscopyen_US
dc.subjectInfrared absorptionen_US
dc.subjectFluorocarbon plasmaen_US
dc.titleTemperature Dependence of the Infrared Absorption Cross-Sections of Neutral Species Commonly Found in Fluorocarbon Plasmasen_US
dc.typetexten_US
dc.type.genrearticleen_US

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