Temperature Dependence of the Infrared Absorption Cross-Sections of Neutral Species Commonly Found in Fluorocarbon Plasmas

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Temperature Dependence of the Infrared Absorption Cross-Sections of Neutral Species Commonly Found in Fluorocarbon Plasmas

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Title: Temperature Dependence of the Infrared Absorption Cross-Sections of Neutral Species Commonly Found in Fluorocarbon Plasmas
Author(s):
Nelson, Caleb T.;
Overzet, Lawrence J.;
Goeckner, Matthew J.
Format: text
Item Type: article
Keywords: Fourier transform infrared spectroscopy
Infrared absorption
Fluorocarbon plasma
Abstract: This article serves as a reference for the analysis of Fourier transform infrared spectroscopy data from processing plasmas. Until now, there has been a lack of accurate reference data for addressing the problems of species identification and density measurements in cases of increasing gas temperatures. Our results show that, while the integrated absorption cross-sections do not change significantly as temperature increases, the temperature of the absorbing species can be estimated from the rotational band maximum in most cases. Integrated absorption cross-sections for c-C3F6, C4F8, C3F8, C2F6, C2F4, and CF4 are presented for all fundamental bands in the 650 cm(-1) to 2000 cm(-1) region. In addition, the binary combination bands up to 4000 cm(-1) are presented for all species. The temperature of each species has been varied to correspond to neutral temperatures commonly found in processing plasmas.
ISSN: 0734-2101
Persistent Link: http://dx.doi.org/10.1116/1.3679408
http://hdl.handle.net/10735.1/3052
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